Immersion lithography continues to drive innovation

Currently, the NXT platform accounts for approximately 80% of the more than 1,100 immersion systems shipped to date. Immersion system market demand is at an all-time high and is expected to remain strong beyond 2023. Our most recent NXT immersion scanner, the NXT:2100i, which was released at the end of last year, demonstrates our engineers' unwavering commitment to pushing this technology forward. It has next-generation imaging capabilities thanks to a lens-adjustment system and is currently used in the most advanced chip nodes at leading chipmakers worldwide. Overall, the productivity of NXT immersion systems has more than doubled in the last nine years, with the most recent systems capable of running more than 6,000 wafers per day. This translates into good value for money for chipmakers.

It’s no exaggeration to say that to remain competitive in the semiconductor landscape, companies need to understand and respond to the industry's unique challenge of addressing technological complexity while ensuring manufacturing affordability. This has been a fundamental approach that has always guided our efforts in bringing immersion lithography to fruition, and while the technology's challenges have evolved over time, our focus on immersion's productivity and affordability for chipmakers as well as the industry as a whole will stay unchanged.

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